Method and apparatus for calculating spatial diagram associated with component

A method for calculating a spatial map associated with a component, the spatial map indicating a spatial variation in a thermal expansion parameter in the component, the method comprising: providing or determining a temperature profile in the component as a function of time; a spatial map associated with the component is calculated using the provided or determined temperature profile in the component and an optical measurement of the radiation beam that interacts directly or indirectly with the component, the optical measurement being time-synchronized with the provided or determined temperature profile in the component. 一种用于计算与部件相关联的空间图的方法，该空间图指示部件中的热膨胀参数的空间变化，该方法包括：提供或确定作为时间的函数的部件中的温度分布；使用所提供的或所确定的部件中的温度分布以及与部件直接或间接相互作用的辐射束的光学测量来计算与部件相关联的空间图，该光学测量与所提供的或所确定的部件中的温度分布时间同步。