Bonding system and bonding method

The embodiment of the invention provides a bonding system and a bonding method. The bonding system comprises a bonding assembly, a wafer bearing table, a first alignment assembly, a second alignment assembly and a third alignment assembly, the first alignment assembly and the second alignment assemb...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHANG YUE, LIU TIANJIAN, TIAN YINGCHAO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The embodiment of the invention provides a bonding system and a bonding method. The bonding system comprises a bonding assembly, a wafer bearing table, a first alignment assembly, a second alignment assembly and a third alignment assembly, the first alignment assembly and the second alignment assembly are respectively used for determining a first position parameter of a first alignment mark on the bonding head and a second position parameter of a second alignment mark on a first tube core picked up by the bonding head when the bonding head is located at the first position; the third alignment assembly is used for determining a third position parameter of a third alignment mark on a second tube core on the wafer and determining a fourth position parameter of a first alignment mark on the bonding head when the bonding head is located at the second position; aligning the first tube core and the second tube core according to the first position parameter, the second position parameter, the third position parameter