Frost valve device, semiconductor manufacturing apparatus including same, and setting method thereof

The invention provides a valve device capable of preventing defects of the valve device caused by extremely low temperature liquid fluid and preventing damage of a heat insulation material, a semiconductor manufacturing apparatus including the same, and a method for installing the semiconductor manufacturing apparatus. The semiconductor manufacturing apparatus according to the present invention comprises: a supercritical liquefier; the valve device is arranged at the lower part of the supercritical liquefier, and comprises an adjusting part and a control part; the spring contracts or loosens through the adjusting part; a relief valve body that contracts or loosens together with the spring; a valve piston to which pressure is applied according to the movement of the safety valve body; a piston ring surrounding the valve piston; a valve housing surrounding the adjustment member, the spring, the relief valve body, the valve piston, and the piston ring; an airtight member surrounding the valve housing to form a s