Insulating roller device

The invention discloses an insulating roller device. The insulating roller device is characterized in that a roller way structure is integrally positioned in a vacuum chamber; the transmission side structure comprises a transmission shaft and a first sealing structure arranged on the transmission sh...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: GE ZHILIANG, LIU RUI, WANG BEI, XIA SHENJIANG, ZHANG KANG, ZHANG CHAOQUN, IJI, CHENG MING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses an insulating roller device. The insulating roller device is characterized in that a roller way structure is integrally positioned in a vacuum chamber; the transmission side structure comprises a transmission shaft and a first sealing structure arranged on the transmission shaft in a sleeving mode, one end of the transmission shaft is located in the vacuum cavity and connected with the roller way structure, and the other end of the transmission shaft extends out of the vacuum cavity and is sealed and insulated through the first sealing structure. The non-transmission side structure comprises a driven shaft and a second sealing structure arranged on the driven shaft in a sleeving mode, one end of the driven shaft is located in the vacuum cavity and connected with the roller way structure, and the other end of the driven shaft extends out of the vacuum cavity and is sealed and insulated through the second sealing structure. The transmission shaft and the driven shaft are each provided wi