ELECTROSTATIC CHUCK AND RELATED METHOD

An electrostatic chuck and related methods are described, the electrostatic chuck comprising: a ceramic layer comprising an upper surface and a lower surface; an electrode at the lower surface; and a dielectric layer between the ceramic layer and the electrode. 本发明描述静电卡盘及相关方法，所述静电卡盘包括：陶瓷层，其包括上表面及下表面...

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Bibliographische Detailangaben
Hauptverfasser:	LIU YAN, MINSKI CLAUDIA, LESCHINSKI JULIA, DONNELL SCOTT
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	An electrostatic chuck and related methods are described, the electrostatic chuck comprising: a ceramic layer comprising an upper surface and a lower surface; an electrode at the lower surface; and a dielectric layer between the ceramic layer and the electrode. 本发明描述静电卡盘及相关方法，所述静电卡盘包括：陶瓷层，其包括上表面及下表面；电极，其在所述下表面处；以及电介质层，其在所述陶瓷层与所述电极之间。