Method, system and equipment for detecting spin coating quality

The invention provides a spin coating quality detection method, system and equipment, and belongs to the field of quality detection. The detection method comprises the following steps: acquiring a gray-scale graph, wherein a to-be-detected product is arranged in the gray-scale graph; dividing the gray-scale graph into a plurality of areas, and determining the gray-scale value of each area; the area of a product area and the area of an abnormal area are determined, the product area is the area occupied by the product in the gray scale graph, the abnormal area is the area in the product area, and the difference value between the gray scale value and the average gray scale value of the product area exceeds a preset threshold value; and calculating the ratio of the area of the abnormal region to the area of the product region, if the ratio is greater than a preset ratio, determining that the product is a defective product, and if the ratio is not greater than the preset ratio, determining that the product is a go