Phi1200mm maximum aperture plane optical interference testing device

The invention discloses a Phi1200mm large aperture plane optical interference test device, which comprises an integrated control module, a laser light source module, a small port interference test module, a large port interference test module, an imaging module, a switching module and a rapid alignm...

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Bibliographische Detailangaben
Hauptverfasser: ZHANG ZHIHUA, HUANG DAN, WANG XUEZHU, ZHAO ZIJIA, CHEN HUI, GE RUIHONG, ZHAO ZHILIANG, CHUNYU YONGXIN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a Phi1200mm large aperture plane optical interference test device, which comprises an integrated control module, a laser light source module, a small port interference test module, a large port interference test module, an imaging module, a switching module and a rapid alignment module, the integrated control module is connected with the laser light source module, the imaging module, the switching module and the rapid alignment module. According to the device, the plane optical element/system test with the maximum caliber reaching the caliber range of phi 1200 mm can be achieved, interference test analysis of parameters such as the reflecting surface shape, the transmitting surface shape and the optical material refractive index uniformity of the plane element with the maximum caliber can be achieved, the PV value of the device test precision is smaller than 63 nm, and the RMS value is smaller than 10 nm. According to the integrated common-path rapid alignment module, rapid alignment o