Ultra-large aperture plane or spherical optical interference testing device
The invention relates to the field of optical system measurement, and discloses an ultra-large aperture plane or spherical surface optical interference test device, which comprises a laser light source assembly, a beam expanding assembly, an ultra-large aperture plane interference test assembly, a s...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to the field of optical system measurement, and discloses an ultra-large aperture plane or spherical surface optical interference test device, which comprises a laser light source assembly, a beam expanding assembly, an ultra-large aperture plane interference test assembly, a spherical surface interference test assembly, an imaging assembly, a test alignment assembly and a light path switching assembly. According to the interference test device, interference test analysis of parameters such as reflecting surface shapes, transmitting surface shapes and refractive index uniformity of optical materials of all aperture plane optical elements within the aperture range of phi 20mm-800mm can be realized, and surface shape detection of a spherical element with the aperture of phi 20mm-800mm and comprehensive wavefront detection of an optical system can be realized at the same time. The maximum testable caliber of the interference test device reaches phi 800mm, the object space resolution of the |
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