Homogenized solution doping device and spraying method

The invention provides a homogenized solution doping method which comprises a solution storage device, a guide pipe, a sprayer, a hard hollow pipe, a quartz reaction pipe, an electric lifting platform, a guide rail, a speed sensor, a nitrogen conveying pipe with a pressure regulating valve and a sup...

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Bibliographische Detailangaben
Hauptverfasser: GE XIN, YI YONGQING, YANG PENG, ZHAO ZHENXUE, WANG DONGBO, ZHAO GUOXIAO, PANG LU, PAN RONG, WU YANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a homogenized solution doping method which comprises a solution storage device, a guide pipe, a sprayer, a hard hollow pipe, a quartz reaction pipe, an electric lifting platform, a guide rail, a speed sensor, a nitrogen conveying pipe with a pressure regulating valve and a supporting seat, one end of the hollow pipe is connected with the solution storage device, and the other end of the hollow pipe is connected with a solution spraying device. The solution storage device controls the pressure of a solution and conveys the solution at a constant speed, the feeding speed is controlled by controlling nitrogen conveying, the ion solution flows out through the hard hollow pipe and enters the sprayer to be sprayed out, the speed sensor is received in real time, and the position information of the sprayer is obtained through calculation. And the electric lifting platform reciprocates to spray an ion solution into the quartz reaction tube for multiple times. The device has the advantages of bei