Coating fluidized bed reactor for producing electronic grade polycrystalline silicon

The invention discloses a coating fluidized bed reactor for producing electronic grade polycrystalline silicon, the coating fluidized bed reactor takes isostatic graphite as a lining material, and the wear resistance of a fluidized bed lining is improved by coating a silicon carbide coating, silicon nitride, carbon fiber or a composite material on the surface of the isostatic graphite lining. And the silicon carbide coating of the graphite cylinder is further coated with silicon to form secondary protection of a three-layer structure, so that the pollution of foreign impurities to a reaction region is further reduced, and the product quality is improved to the level of electronic-grade polycrystalline silicon. 本发明公开了一种用于生产电子级多晶硅的涂层流化床反应器，所述涂层流化床反应器以等静压石墨为内衬材料，并通过在等静石墨内衬表面涂覆碳化硅涂层、氮化硅、碳纤维或复合材料来提升流化床内衬的抗磨损性能。并进一步对石墨筒体碳化硅涂层进行硅涂层，形成三层结构的二次保护，进一步减少外来杂质对反应区的污染，将产品质量提高至电子级多晶硅水平。