Driving apparatus, lithographic apparatus, and method of manufacturing article

The invention relates to a driving apparatus, a lithographic apparatus, and a method of manufacturing an article. Provided is a drive device comprising: a power supply unit for supplying power to a drive unit including a motor and a motor driver; a storage battery capable of storing power from the p...

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1. Verfasser: OISHI SHINJI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to a driving apparatus, a lithographic apparatus, and a method of manufacturing an article. Provided is a drive device comprising: a power supply unit for supplying power to a drive unit including a motor and a motor driver; a storage battery capable of storing power from the power supply unit and regenerative power from the drive unit; a switching unit that is provided between the power supply unit and the capacitor and that switches the state between the power supply unit and the capacitor to a connected state or a disconnected state; and a control unit for controlling the switching unit, the control unit predicting a first voltage value required by the motor driver in order to drive the motor and a second voltage value of the capacitor that varies due to the driving of the motor on the basis of a driving condition of the motor, and controlling the switching unit on the basis of the first voltage value and the second voltage value. And a control unit that controls the switching by the