Driving apparatus, lithographic apparatus, and method of manufacturing article
The invention relates to a driving apparatus, a lithographic apparatus, and a method of manufacturing an article. Provided is a drive device comprising: a power supply unit for supplying power to a drive unit including a motor and a motor driver; a storage battery capable of storing power from the p...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | chi ; eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The invention relates to a driving apparatus, a lithographic apparatus, and a method of manufacturing an article. Provided is a drive device comprising: a power supply unit for supplying power to a drive unit including a motor and a motor driver; a storage battery capable of storing power from the power supply unit and regenerative power from the drive unit; a switching unit that is provided between the power supply unit and the capacitor and that switches the state between the power supply unit and the capacitor to a connected state or a disconnected state; and a control unit for controlling the switching unit, the control unit predicting a first voltage value required by the motor driver in order to drive the motor and a second voltage value of the capacitor that varies due to the driving of the motor on the basis of a driving condition of the motor, and controlling the switching unit on the basis of the first voltage value and the second voltage value. And a control unit that controls the switching by the |
---|