Method and device for correcting field curvature of microscope

The invention discloses a field curvature correction method and device for a microscope, and the method comprises the steps: placing a standard workpiece on a bearing platform, and enabling the standard workpiece to have a standard surface; the standard plane is located on the focal plane of the mic...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZHANG HEJUN, HUO KUO, XU CHENXU, ZHANG HUJIE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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