Device and method for automatically testing transmittance of monochromator FP filter array

The invention discloses a monochromator FP filter array transmittance automatic testing device and a monochromator FP filter array transmittance automatic testing method, is applied to the field of absolute transmittance testing of an FP cavity filter array, and aims to solve the problems that in th...

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Bibliographische Detailangaben
Hauptverfasser: ZHANG HONGBO, LIU ZIJI, ZHANG MING, LEE SUNG-SE, ZHAO ZHENGTING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a monochromator FP filter array transmittance automatic testing device and a monochromator FP filter array transmittance automatic testing method, is applied to the field of absolute transmittance testing of an FP cavity filter array, and aims to solve the problems that in the prior art, the absolute transmittance of a small-size filter cannot be accurately measured, and the accurate half-peak width, peak wavelength and other information of the filter cannot be calculated. And automatic testing cannot be carried out. According to the invention, loss of light source energy is reduced by using an off-axis mirror collimation and focusing mode, a light source which is originally diverged by emergent light of a monochromator is collimated through a collimating mirror, a light beam adjusted by a diaphragm is enabled to be better matched with the size of a detected FP cavity filter, an FP cavity filter array is moved through a three-dimensional movable objective table, and the size of the FP