ANTENNA MEMBER AND APPARATUS FOR PROCESSING SUBSTRATE
The inventive concept provides an antenna member. In one embodiment, the antenna member includes a first coil and a second coil rotationally symmetrical to each other, and wherein the first coil includes a first power supply terminal to which a current is applied and a first ground terminal connecte...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The inventive concept provides an antenna member. In one embodiment, the antenna member includes a first coil and a second coil rotationally symmetrical to each other, and wherein the first coil includes a first power supply terminal to which a current is applied and a first ground terminal connected to ground, and the second coil includes a second power supply terminal to which a current is applied and a second ground terminal connected to ground, and wherein the first coil and the second coil each include a first portion having an arc shape and a second portion having an arc shape, the first portion and the second portion as a whole forming a circle of winding, and the second portion has a lower height relative to the first portion when viewed from a side, the first portion of the first coil is positioned below the first portion of the first coil, and the second portion of the second coil is positioned below the first portion of the first coil, and the second portion of the first coil is positioned below th |
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