Optical integration integrated atomic chip and manufacturing method thereof

The invention discloses an optical integration integrated atomic chip which comprises a transparent material cuboid, diffraction light splitting micro devices are arranged at the two ends of the transparent material cuboid respectively, an atomic gas chamber is arranged in the middle of the transpar...

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Bibliographische Detailangaben
Hauptverfasser: ZHA WENZHANG, WANG CHENSHENG, DONG TINGTING, CAO MINGLANG, WU XINJIAN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses an optical integration integrated atomic chip which comprises a transparent material cuboid, diffraction light splitting micro devices are arranged at the two ends of the transparent material cuboid respectively, an atomic gas chamber is arranged in the middle of the transparent material cuboid, and three-dimensional waveguides are arranged between the two diffraction light splitting micro devices and the atomic gas chamber respectively. The diffraction light splitting micro device at the left end is provided with two diffraction light splitting areas, and each diffraction light splitting area corresponds to one laser beam; the diffraction light splitting micro device at the right end is provided with a diffraction light splitting area; the laser beam forms split laser after passing through the diffraction light splitting micro device, and then the beam direction is corrected through the three-dimensional waveguide, so that the split laser is emitted into the atomic gas chamber in para