Safety structure of water-cooled frequency converter of dry vacuum pump

A dry vacuum pump water-cooled frequency converter safety structure disclosed by the present invention comprises a mainboard and a water cooling layer, the upper end surface of the mainboard is provided with a hidden layer for isolating strong and weak current, the side surface of one side of the hi...

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Bibliographische Detailangaben
Hauptverfasser: KONG XIANGLING, SONG DEXUE, WANG GUANGYU, LIU ZAIXING, MIAO YU, ZHANG JUN, ZHANG JIAQI, BI DELONG, GUO LIJUAN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:A dry vacuum pump water-cooled frequency converter safety structure disclosed by the present invention comprises a mainboard and a water cooling layer, the upper end surface of the mainboard is provided with a hidden layer for isolating strong and weak current, the side surface of one side of the hidden layer far away from the mainboard is provided with a weak current area, a wire arrangement area and a wiring area, and the water cooling layer is arranged at the lower end of the mainboard. The water cooling layer comprises a water cooling radiator, a water inlet pipe and a water drainage pipe. Electrical safety of the frequency converter is guaranteed, miniaturization of the vacuum pump is achieved, the water-cooling radiator at the bottom of the water-cooling frequency converter can effectively reduce space thermal load in a semiconductor factory, the effects of energy conservation and emission reduction are achieved, 70% of space thermal radiation of the water-cooling frequency converter is reduced under th