Flat-bottom shielding ring

In some examples, a flat-bottomed masking ring (fBSR) for processing a substrate in a processing chamber is provided. An exemplary fBSR includes a suspension to cover an edge of a substrate in a processing chamber. The overhang includes a flat region that extends radially outward across an outer edg...

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Bibliographische Detailangaben
Hauptverfasser:	LIN FRANK YUN, KIM JI-SOO, WEI LAI, CHIANG CONAN, MILLER ALAN JEFFREY, LIU JIE, HAN JUN-HEE, MARTIN MICHAEL JOHN, THIE WILLIAM
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	In some examples, a flat-bottomed masking ring (fBSR) for processing a substrate in a processing chamber is provided. An exemplary fBSR includes a suspension to cover an edge of a substrate in a processing chamber. The overhang includes a flat region that extends radially outward across an outer edge of the substrate. 在一些示例中，提供了用于在处理室中处理衬底的平底遮蔽环(fBSR)。示例性的fBSR包含用于覆盖处理室中的衬底边缘的悬出部。悬出部包括径向向外延伸越过衬底的外缘的平坦区。