Ultrafast tunable space phase modulator for 6G communication and manufacturing method
The invention is suitable for the field of modulation devices, and provides an ultrafast tunable space phase modulator for 6G communication and a manufacturing method. The tunable space phase modulator is used for receiving terahertz waves and is used for the terahertz wave modulation device, the te...
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Format: | Patent |
Sprache: | chi ; eng |
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