Ultrafast tunable space phase modulator for 6G communication and manufacturing method

The invention is suitable for the field of modulation devices, and provides an ultrafast tunable space phase modulator for 6G communication and a manufacturing method. The tunable space phase modulator is used for receiving terahertz waves and is used for the terahertz wave modulation device, the terahertz wave modulation device comprises a field source, and the field source can generate an action field acting on the tunable space phase modulator; the tunable space phase modulator comprises a base body and a modulation part arranged on the base body, the modulation part comprises a sub-wavelength structural member and a modulation layer, the sub-wavelength structural member is spirally arranged on the base body in a coiled mode in the direction from the position close to the base body to the position away from the base body, and the highest height of the sub-wavelength structural member is equal to the center wavelength of terahertz waves. And the modulation layer is arranged on the surface, far away from the