MEMS actuator and manufacturing process thereof

The invention relates to a MEMS actuator and a manufacturing process thereof. A MEMS actuator includes a semiconductor body having a first surface defining a housing cavity facing the first surface and having a bottom surface, the semiconductor body further defining a fluid channel in the semiconductor body, the fluid channel having a first end across the bottom surface. The strainable structure extends into the housing cavity, is coupled to the semiconductor body at the bottom surface, and defines an interior space facing the first end of the fluid channel, and includes at least first and second interior subspaces connected to each other and to the fluid channel. When fluid is pumped through the fluid passage into the interior space, the first and second interior subspaces expand to strain the strainable structure along the first axis and generate an actuation force applied by the strainable structure along the first axis in an opposite direction relative to the housing cavity. 本公开涉及MEMS致动器及其制造工艺。一种MEMS致动器，包