Galvanometer local correction compensation method based on double galvanometer lenses

The invention relates to the technical field of galvanometer correction, in particular to a galvanometer local correction compensation method based on double galvanometer lenses, which comprises the following steps of: performing original correction by adopting a double-galvanometer lens association...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HUANG GANG, ZHANG YIMOU, ZHOU HU
Format: Patent
Sprache:chi ; eng
Schlagworte:
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