APPARATUS AND METHOD FOR ACCELERATING A DROPLET IN A DROPLET GENERATOR OF AN EUV SOURCE

An apparatus and method for accelerating droplets for generating EUV radiation includes an apparatus for generating a laser beam directed towards an irradiation region and a droplet source. The droplet source includes a fluid exiting the nozzle in the form of a stream that breaks down into droplets...

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Hauptverfasser:	VASICHENKO GEORGIY O, ERSHOV ALEXANDER I, RAJAGURU CHANDRASEKHAR, DRIESSEN THEODORUS, RAFAC ROBERT JAY, TRESS DAVID U H, LUKENS JESSICA M
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY X-RAY TECHNIQUE
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Beschreibung
Zusammenfassung:	An apparatus and method for accelerating droplets for generating EUV radiation includes an apparatus for generating a laser beam directed towards an irradiation region and a droplet source. The droplet source includes a fluid exiting the nozzle in the form of a stream that breaks down into droplets and then undergoes coalescence. Then, the liquid drops are subjected to the action of the air flow, and the air flow carries the liquid drops and accelerates the liquid drops. 用于加速用于生成EUV辐射的液滴的装置和方法包括产生导向照射区域的激光束的装置和液滴源。液滴源包括以流的形式离开喷嘴的流体，该流分解成液滴，然后经历聚结。然后，液滴受到气流的作用，气流夹带液滴并使之加速。