BLOCKING VALVE FOR SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

The invention relates to a blocking valve for a substrate processing apparatus and the substrate processing apparatus. The blocking valve includes a valve unit, a driver, and a blocking body. The valve unit includes an opening/closing unit that can contract and extend. The driver drives the on/off u...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	LEE TAE-HO, MIN MYOUNG-KI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ACTUATING-FLOATS BASIC ELECTRIC ELEMENTS BLASTING COCKS DEVICES FOR VENTING OR AERATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING SEMICONDUCTOR DEVICES TAPS THERMAL INSULATION IN GENERAL VALVES WEAPONS
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Beschreibung
Zusammenfassung:	The invention relates to a blocking valve for a substrate processing apparatus and the substrate processing apparatus. The blocking valve includes a valve unit, a driver, and a blocking body. The valve unit includes an opening/closing unit that can contract and extend. The driver drives the on/off unit. The blocking body comprises an accommodating unit, and the opening/closing unit is accommodated in the accommodating unit. The blocking body comprises a gas inlet connected to the accommodating unit and a gas outlet connected to the accommodating unit, and the opening/closing unit opens or closes the gas inlet or the gas outlet in the accommodating unit. 本发明相关于一种用于基板处理设备的阻断阀以及基板处理设备，阻断阀包含阀单元、驱动器以及阻断本体。阀单元包含会收缩及伸出的开启/关闭单元。驱动器驱动开启/关闭单元。阻断本体包含容置单元，且开启/关闭单元容置于容置单元中。阻断本体包含连接于容置单元的气体流入口以及连接于容置单元的气体流出口，且开启/关闭单元在容置单元中开启或关闭气体流入口或气体流出口。