Compensation method and system of silicon piezoresistive air pressure sensing module

The invention provides a compensation method and system for a silicon piezoresistive air pressure sensing module. The compensation method comprises the following steps: monitoring and collecting a calibrated air pressure value, calibrated temperature information and corresponding excitation voltage;...

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Hauptverfasser: ZHU XIAO, SHANG KEJUN, HAN SHICHAO, ZU JIANJING, BAI NAN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention provides a compensation method and system for a silicon piezoresistive air pressure sensing module. The compensation method comprises the following steps: monitoring and collecting a calibrated air pressure value, calibrated temperature information and corresponding excitation voltage; normalizing the calibrated air pressure value, the calibrated temperature information and the corresponding excitation voltage; constructing a regression equation relationship between the calibrated air pressure value, the calibrated temperature information and the corresponding excitation voltage and the output voltage; substituting the acquired calibration air pressure value, the calibration temperature information and the corresponding excitation voltage into a regression equation relation, and calculating to obtain a mapping matrix coefficient in the regression equation relation; and on the basis of the regression equation relationship, according to the calibration temperature information at the current moment