Method and system for detecting response time of MEMS thermopile
The invention relates to a response time detection method and system of an MEMS thermopile. The detection method comprises the following steps: providing an MEMS thermopile to be detected, and integrating a detection heater for providing a heat source required by response time detection in an infrar...
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| creator | XIANG ZEQING DING XUEFENG MAO HAIYANG |
| description | The invention relates to a response time detection method and system of an MEMS thermopile. The detection method comprises the following steps: providing an MEMS thermopile to be detected, and integrating a detection heater for providing a heat source required by response time detection in an infrared absorption region of the MEMS thermopile; the detection heater is driven to work, so that the detection heater is configured as a heat source, and heat generated by working of the detection heater is transmitted to a hot end of a thermocouple in the MEMS thermopile so as to drive the MEMS thermopile to respond to work; acquiring response output voltage of the MEMS thermopile based on heat transferred by the detection heater; and determining the response time of the MEMS thermopile based on the acquired response output voltage of the MEMS thermopile. According to the invention, high-precision detection of the response time of the MEMS thermopile can be realized, the stability is high, the method is compatible wit |
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The detection method comprises the following steps: providing an MEMS thermopile to be detected, and integrating a detection heater for providing a heat source required by response time detection in an infrared absorption region of the MEMS thermopile; the detection heater is driven to work, so that the detection heater is configured as a heat source, and heat generated by working of the detection heater is transmitted to a hot end of a thermocouple in the MEMS thermopile so as to drive the MEMS thermopile to respond to work; acquiring response output voltage of the MEMS thermopile based on heat transferred by the detection heater; and determining the response time of the MEMS thermopile based on the acquired response output voltage of the MEMS thermopile. 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| subjects | COLORIMETRY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY TESTING |
| title | Method and system for detecting response time of MEMS thermopile |
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