Method and system for detecting response time of MEMS thermopile

The invention relates to a response time detection method and system of an MEMS thermopile. The detection method comprises the following steps: providing an MEMS thermopile to be detected, and integrating a detection heater for providing a heat source required by response time detection in an infrared absorption region of the MEMS thermopile; the detection heater is driven to work, so that the detection heater is configured as a heat source, and heat generated by working of the detection heater is transmitted to a hot end of a thermocouple in the MEMS thermopile so as to drive the MEMS thermopile to respond to work; acquiring response output voltage of the MEMS thermopile based on heat transferred by the detection heater; and determining the response time of the MEMS thermopile based on the acquired response output voltage of the MEMS thermopile. According to the invention, high-precision detection of the response time of the MEMS thermopile can be realized, the stability is high, the method is compatible wit