SURFACE TREATMENT APPARATUS

A high-speed, uniform and high-quality surface treatment apparatus. The equipment comprises a tubular hollow cavity, a polygonal hollow cylinder capable of rotating is arranged in the cavity, and a plurality of bearing units capable of placing various planar substrates are symmetrically arranged on the cylinder, so that the substrate bearing units can revolve along with the rotation of the hollow cylinder. Various gas injection channels, exhaust pipelines and surface treatment devices are arranged on the fixed cavity wall, and the arrangement mode corresponds to the position of each substrate bearing unit on the column body. Therefore, when each substrate bearing unit revolves, a processing chamber formed by the planar substrate and the cavity wall can regularly perform multiple cycles of steps of air intake, reaction, air exhaust and the like, so that the planar substrate can be subjected to multi-cycle surface processing. 一种高速、均匀且高品质的表面处理设备。此设备包含一个圆管形中空腔体，腔体内置有一个可自转的多边形中空柱体，柱体上以对称方式设有数个可以放置各种平面型基板的承载单元，因此基板