Device and method for calibrating quality of quartz crystal microbalance at low temperature

The invention discloses a device and a method for calibrating the quality of a quartz crystal microbalance at low temperature. The device comprises a low-temperature sealing cavity, ellipsometer equipment, a temperature control unit and a pressure and component control unit, a low-temperature cold table, an emission electrode and a target material are arranged in the low-temperature sealing cavity, the low-temperature cold table is used for placing a quartz crystal oscillator, and the target material is uniformly deposited on the surface of the quartz crystal oscillator through the emission electrode subjected to magnetron sputtering; the ellipsometer equipment comprises a polarizer and a polarization analyzer; the polarizer and the polarization analyzer are respectively arranged on two side walls of the low-temperature sealing cavity; the temperature control unit is arranged at the lower part of the low-temperature cooling table and is used for controlling the cold surface temperature of the low-temperature