Rare earth rotating target material as well as preparation method and application thereof

The invention discloses a rare earth rotating target material and a preparation method and application thereof.The method comprises the steps that a back pipe and powdery raw materials are placed in a mold, a composite structure with the back pipe in the center and raw material layers on the periphe...

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Bibliographische Detailangaben
Hauptverfasser: WANG ZHIQIANG, ZHOU LIN, ZHANG XIAOQIANG, CHEN DEHONG, LI ZONGAN, ZHONG JIAMIN, WU DAOGAO, LIU DEZHONG, ZHANG HONGCHAO, PANG SIMING, WANG SHUANG, CHENG JUN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a rare earth rotating target material and a preparation method and application thereof.The method comprises the steps that a back pipe and powdery raw materials are placed in a mold, a composite structure with the back pipe in the center and raw material layers on the periphery is formed, the raw materials comprise rare earth metal elementary substances and/or rare earth alloy, and the raw material layers comprise the first raw material layer and the second raw material layer; the first raw material layer is located between the back pipe and the second raw material layer, and the particle size of raw materials in the first raw material layer is smaller than that of raw materials in the second raw material layer; and cold/hot isostatic pressing forming is conducted on the composite structure, the temperature difference between the back pipe and the raw material layer is controlled in the sintering and cooling process, and the rare earth rotating target material is obtained. According to