Workpiece separation device and workpiece separation method

The invention provides a workpiece separating apparatus and a workpiece separating method, which can easily peel a support body from a solidification layer by performing selective light irradiation on a local joint part of the support body and the solidification layer. The workpiece separating devic...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: TOMIOKA KYOHEI, OHTANI, YOSHIKAZU
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The invention provides a workpiece separating apparatus and a workpiece separating method, which can easily peel a support body from a solidification layer by performing selective light irradiation on a local joint part of the support body and the solidification layer. The workpiece separating device is characterized in that the workpiece separating device is provided with the following components: a holding component which holds any one of a workpiece side of a laminated body and a supporting body in a free assembling and disassembling manner; a light irradiation unit that irradiates light toward the separation layer through the other one of the support body and the workpiece side of the laminate held by the holding member; an isolation member that moves either the workpiece side of the laminated body or the support body in an isolated manner in the thickness direction; and a control unit for controlling the operation of the light irradiation unit and the isolation member, the laminated body having: a separa