Pressure sensor element, pressure sensor module and signal correction method thereof

The present invention relates to a pressure sensor element that detects a change in capacitance between electrodes. A pressure sensor element (1) is provided with an electrically insulating substrate (10), a base electrode layer (20), spacers (30, 31), a protective electrode layer (30A), a film plat...

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Bibliographische Detailangaben
1. Verfasser:	SUGIBAYASHI HIDEAKI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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