Pressure sensor element, pressure sensor module and signal correction method thereof

The present invention relates to a pressure sensor element that detects a change in capacitance between electrodes. A pressure sensor element (1) is provided with an electrically insulating substrate (10), a base electrode layer (20), spacers (30, 31), a protective electrode layer (30A), a film plate (40), and the like. A sensing electrode (S), which is a sensing electrode section, and monitoring electrodes (M1-M4), which are monitoring electrode sections, are provided on a film plate (40) so as to face a substrate (10). The monitoring electrodes (M1-M4) detect the stress strain generated in the spacers (30, 31) when mounted on the circuit board. According to the structure, high measurement accuracy can be achieved even after the device is installed on a circuit substrate. 本发明涉及一种对电极间的静电电容的变化进行探测的压力传感器元件。压力传感器元件(1)具备电绝缘性的基板(10)、基底电极层(20)、间隔部(30、31)、保护电极层(30A)以及膜板(40)等。作为传感电极部的传感电极(S)及作为监视电极部的监视电极(M1～M4)以与基板(10)相向的方式设置于膜板(40)。监视电极(M1～M4)在被安装到电路基板的情况下对在间隔部(30、31)产生的应力应变进行探测。根据这样的结构，即使是在安装到电路基板之后也能够实现高测定精度。