SEMICONDUCTOR MEMORY DEVICE

The embodiment provides a semiconductor memory device with good characteristics. According to one embodiment, a semiconductor memory device includes: a plurality of conductive layers arranged in a first direction; a semiconductor layer extending in the first direction and facing the plurality of con...

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Bibliographische Detailangaben
Hauptverfasser: ITOKAWA HIROSHI, ISOGAI TATSUNORI, SAWABE RYOSUKE, FUKUSHIMA TAKASHI, SAKAI YUJI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The embodiment provides a semiconductor memory device with good characteristics. According to one embodiment, a semiconductor memory device includes: a plurality of conductive layers arranged in a first direction; a semiconductor layer extending in the first direction and facing the plurality of conductive layers; a charge storage layer provided between the plurality of conductive layers and the semiconductor layer; a first structure disposed apart from the semiconductor layer in a second direction intersecting the first direction, extending in a third direction intersecting the first direction and the second direction, and facing the plurality of conductive layers; and a plurality of first nitride films that cover the surfaces of the plurality of conductive layers facing the first structure and contain nitrogen (N). 实施方式提供一种特性良好的半导体存储装置。实施方式的半导体存储装置具备:多个导电层,沿第1方向排列;半导体层,沿第1方向延伸,且与多个导电层对向;电荷蓄积层,设置在多个导电层与半导体层之间;第1构造,在与第1方向交叉的第2方向上与半导体层相隔配置,沿与第1方向及第2方向交叉的第3方向延伸,且与多个导电层对向;以及多个第1氮化膜,覆盖多个导电层的与第1构造的对向面,且包含氮(N)。