Measuring device for reflector focus defocused spots

The invention relates to a reflector focus defocused spot measuring device. The device is characterized by comprising a CCD (Charge Coupled Device) detector 1, a microscope objective 2, a hollow 45-degree reflecting mirror 3, a parallel light source and light tube 4, a parallel light tube bracket 5, a curved reflecting mirror 6, a base supporting plate 7, a reflecting mirror x-axis and y-axis precision moving workbench 8, a z-axis precision moving workbench 9 and a computer 10. According to the invention, a plurality of parameters such as energy distribution of focusing defocused spots of the measured reflector, long and short axes of focal spots, optical axis and mechanical axis deflection angles can be measured at the same time, detection information is transmitted to a computer for data processing, and the measurement efficiency and precision are greatly improved. 本发明涉及了一种反射镜焦点弥散斑的测量装置。其特征是：它由CCD探测器1、显微物镜2、中空45度反射镜3、平行光源及光管4、平行光管支架5、曲面反射镜6、底座支撑板7、反射镜x，y轴精密移动工作台8、z轴精密移动台9、计算机10组成。本发明能够同时测量被测反射镜聚焦弥散斑的能量分布和焦斑