Three-electrode vacuum degree measuring sensor

The invention relates to the technical field of vacuum gauges, and provides a three-electrode vacuum degree measurement sensor. The electrode plate is arranged in the shell and divides the shell into a reference cavity and a process cavity; the elastic film is arranged in the process cavity and is connected with the electrode plate to form a closed cavity; the first end of the first electrode penetrates through the closed cavity and is connected with the elastic film, and the second end of the first electrode penetrates through the reference cavity and extends out of the shell; the first ends of the second electrode and the third electrode are connected with the electrode plate, and the second ends of the second electrode and the third electrode penetrate through the reference cavity and extend out of the shell. The electrodes of the elastic film are independently led out to form three independent polar plates including the inner ring electrode, the outer ring electrode and the common electrode, so that the i