Intelligent water cooling device for single crystal furnace production

The invention relates to the technical field of single crystal furnace production, in particular to an intelligent water cooling device for single crystal furnace production, which comprises a furnace body, an annular plate is fixedly mounted on the inner side of the furnace body, and a plurality of...

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Bibliographische Detailangaben
Hauptverfasser: GAO YUSHUN, GAO SHENGQUAN, LUO QIAN, ZHANG PEISHUN, HAN YONGLONG, YANG FU, XUE ZHANFU, SU XIN, YU QUANZHU, YI QINGHUA
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to the technical field of single crystal furnace production, in particular to an intelligent water cooling device for single crystal furnace production, which comprises a furnace body, an annular plate is fixedly mounted on the inner side of the furnace body, and a plurality of first water cooling plates annularly arrayed along the inner wall of a hole of the annular plate are arranged in the middle of the annular plate through a driving mechanism; the driving mechanism is used for driving the first water cooling plates to synchronously move towards the center of the annular plate or away from the center of the annular plate, the ends, close to each other, of every two adjacent first water cooling plates are provided with second water cooling plates through connecting structures, and the connecting mechanisms are used for driving the second water cooling plates to synchronously move when the first water cooling plates move. A water passing mechanism is arranged between the first water co