Coating device for depositing coating material on substrate

The invention relates to a coating device (1) having a vacuum chamber (8), a crucible (6), at least one spray head (7) for pre-processing a coating material, and a spray pipe (5), the spray pipe (5) being designed to guide the pre-processed coating material to the crucible (6) and being connected to...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GIORGIO MAURIZIO, ZWICK, AXEL, ROCH, TH ¨ ¢ R, STRACK MICHAEL, SCHWERDT CHRISTIAN, SAUER-PAS, JANINERISTINE, TOPALSKI SLAVCHO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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