Coating device for depositing coating material on substrate

The invention relates to a coating device (1) having a vacuum chamber (8), a crucible (6), at least one spray head (7) for pre-processing a coating material, and a spray pipe (5), the spray pipe (5) being designed to guide the pre-processed coating material to the crucible (6) and being connected to the crucible (6), the at least one spray head (7) being movable between an operating position, in which the spray head (7) can be removed from the crucible (6), and a removal position, in which the spray head (7) can be removed from the crucible (6). The spray head (7) supplies a pre-processed coating material to the spray tube (5), and wherein at least one removal chamber (12) is provided which is designed to be accessible from outside the vacuum chamber (8), which removal chamber is sealable relative to the vacuum chamber (8), and in which at least one spray head (7) is arranged in its removal position to be separated in a gas-tight manner relative to the vacuum chamber (8). 本发明涉及一种涂层装置(1)，其具有真空室(8)、坩埚(6)、用于预加工涂