Film processing equipment, film offset correction device and film offset correction method

The invention discloses thin film processing equipment, a thin film offset correction device and a thin film offset correction method. The thin film offset correction device can be matched with a roller set to convey a thin film. The film offset correction device comprises an airflow adjusting unit used for controlling air inlet and outlet of airflow, a translation driving unit, a correction roller, a fixed roller and an offset detector. A plurality of correction wheel air holes which are communicated with the airflow adjusting unit and enable airflow to enter and exit to act on the film are formed in the surface of the correction roller. The fixed roller is arranged between the correction roller and the roller set, and a plurality of fixed roller air holes which are communicated with the airflow adjusting unit and enable airflow to enter and exit to act on the film are formed in the surface of the fixed roller. When the offset detector detects that the offset of the thin film is larger than a threshold value