Layout splitting method and computer medium

The invention relates to the technical field of photoetching, in particular to a layout splitting method and a computer medium, and the splitting method comprises the following steps: obtaining an initial layout, and dividing the obtained initial layout into a plurality of preset plates in a preset...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHEN ZHAO, DENG XINGLEI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING PHYSICS
Online-Zugang:	Volltext bestellen
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