Wafer defect detection device and detection equipment thereof

The invention provides a wafer defect detection device and detection equipment thereof. The wafer defect detection device comprises an objective table and an optical detector. The objective table comprises a base, a sliding assembly is arranged on the base, the detection platform is in sliding connection with the base through the sliding assembly, and the optical detector is arranged above the detection platform and connected with the base through a movable support. The optical detector comprises a light source assembly and a driving assembly, the light source assembly is used for emitting various types of detection light to the surface of the wafer, and meanwhile the driving assembly drives the light source assembly to rotate in the circumferential direction of the wafer and adjusts the angle between the detection light and the surface of the wafer. Therefore, the accuracy and the efficiency of surface defect detection of the wafer placed on the detection platform are realized, and the labor cost is reduced.