Multi-functional large-magnification attenuation module batch assembling and detecting device and assembling and detecting method

The invention provides a multifunctional large-magnification attenuation module batch installation and inspection device and method, and mainly solves the problems that an existing method for directly observing imaging quality and error angles by using a system detector is low in efficiency, large i...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LEI YU, LI HUA, KANG SHIFA, CAO MINGQIANG, ZHENG XIANGKE
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a multifunctional large-magnification attenuation module batch installation and inspection device and method, and mainly solves the problems that an existing method for directly observing imaging quality and error angles by using a system detector is low in efficiency, large in error and high in efficiency under the condition of batch installation and adjustment of multifunctional large-magnification attenuation modules. And the production efficiency and the quality of the multifunctional high-rate attenuation module are severely influenced. Comprising an operation table, an optical platform, a computer placed on the operation table, four positioning bases installed on the optical platform, two fixed bottom plates, two translation tables, a pentaprism, a standard angle block, a first plane mirror, a second plane mirror, four two-dimensional adjusting supports, four auto-collimation low-light-level measuring tubes and four CCD detectors, and the four positioning bases, the two fixed bott