Preparation method of large-size high-performance niobium oxide target material
The invention provides a preparation method of a large-size high-performance niobium oxide target material, and belongs to the technical field of photoelectric materials.The preparation method comprises the steps that niobium oxide powder, activating agent carbon powder and reducing agent are taken...
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Sprache: | chi ; eng |
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Zusammenfassung: | The invention provides a preparation method of a large-size high-performance niobium oxide target material, and belongs to the technical field of photoelectric materials.The preparation method comprises the steps that niobium oxide powder, activating agent carbon powder and reducing agent are taken to be evenly mixed, then the obtained powder is evenly loaded into a mold, single-piece initial pressing is conducted, an obtained rough blank is heated to 1100-1150 DEG C, and the rough blank is cooled to the room temperature; and then pressurizing to 25-38 MPa by adopting a multi-section and two-way pressurizing mode, carrying out vacuum hot pressing sintering, slowly cooling to 580-620 DEG C at 1.8-2.2 DEG C/min, and then relieving the pressure and naturally cooling to obtain the large-size high-performance niobium oxide target material. The maximum area of the prepared large-size high-performance niobium oxide target material can reach 1900 cm < 2 >, the performance is uniform, and the problem that the large-si |
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