Chip coating bubble prevention, control and elimination system based on visual positioning

The invention relates to the technical field of chip coating bubble elimination, and discloses a chip coating bubble prevention and control elimination system based on visual localization, after a to-be-coated silicon wafer is pushed to a proper position, a plurality of alignment cameras and the lik...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZHANG YINGMING, WU GUANGZHI, WANG ZHENG, LIU HUAIZENG, AO YAOTING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL CUTTING DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING,CUTTING-OUT, STAMPING-OUT OR SEVERING HAND CUTTING TOOLS PERFORMING OPERATIONS SEVERING SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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