Plasma generating device and plasma processing system based on micro-nano conductive fiber material

The invention provides a plasma generating device. The plasma generating device comprises at least one micro-nano conductive fiber positive electrode used for releasing positive ions and at least one micro-nano conductive fiber negative electrode used for releasing negative ions. The micro-nano conductive fiber positive electrode and the micro-nano conductive fiber negative electrode comprise a micro-nano conductive fiber material. For example, the micro-nano conductive fiber positive electrode comprises a micro-nano conductive fiber sheet or a micro-nano conductive fiber block. The micro-nano conductive fiber negative electrode can also comprise a micro-nano conductive fiber sheet or a micro-nano conductive fiber block. 本公开提供一种等离子发生装置，包括：用于释放正离子的至少一个微纳米导电纤维正极以及用于释放负离子的至少一个微纳米导电纤维负极。微纳米导电纤维正极和微纳米导电纤维负极包括微纳米导电纤维材料。例如，微纳米导电纤维正极包括微纳米导电纤维片或微纳米导电纤维块。微纳米导电纤维负极也可以包括微纳米导电纤维片或微纳米导电纤维块。