Discharge detection device and charged particle beam irradiation device

The invention provides a discharge detection device and a charged particle beam irradiation device, which can reduce the frequency of discharge caused by a holding member for holding an antenna. A discharge detection device according to an embodiment includes: a vacuum container; an electrically con...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MUROFUSHI TATSUYA, YAMANAKA YOSHIRO, HAYAKAWA HIROKI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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