Discharge detection device and charged particle beam irradiation device

The invention provides a discharge detection device and a charged particle beam irradiation device, which can reduce the frequency of discharge caused by a holding member for holding an antenna. A discharge detection device according to an embodiment includes: a vacuum container; an electrically conductive installation member which is provided inside the vacuum container and which is held in the vacuum container by being connected to the vacuum container; a conductive antenna provided in the vacuum container; and a holding body including a material having a resistivity in the range of 1 * 105 to 1 * 1011 (Omega * cm), the holding body being provided across the interior of the antenna and the interior of the holding body by screws, and the antenna being held by the setting member without bringing the setting member into contact with the antenna, the holding body including a material having a resistivity in the range of 1 * 105 to 1 * 1011 (Omega * cm). 本发明提供一种放电检测装置以及带电粒子束照射装置，能够减少因保持天线的保持部件而引起的放电的频率。实施方式的放电检测