Excimer laser energy adjusting device and method

The invention discloses an excimer laser energy adjusting device and method, and the device comprises a laser discharge cavity, a line width narrowing module, a coupling mirror module, a first energy collection device, a second energy collection device, a first controller, and a second controller. The coupling mirror module and the first energy collection device are respectively and sequentially arranged in the light emitting direction of the laser discharge cavity; the first energy collection device is used for collecting laser energy emitted along the light emitting direction of the laser discharge cavity; the line width narrowing module is arranged on one side of the direction opposite to the light emitting direction of the laser discharge cavity, and the second energy collection device collects laser energy emitted in the direction; and the first controller and the second controller are respectively connected with the dispersion grating of the line width narrowing module and the output coupling mirror of