SiC semiconductor device

This SiC semiconductor device is provided with: a SiC chip that has a main surface that includes a first surface, a second surface that is recessed in the thickness direction from the outside of the first surface, and a connection surface that connects the first surface and the second surface, and t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YAMAMOTO KENJI, SHIRAGAMI HIROAKI, MORI SEIGO, NAKANO YUKI, UENO MASAYA
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:This SiC semiconductor device is provided with: a SiC chip that has a main surface that includes a first surface, a second surface that is recessed in the thickness direction from the outside of the first surface, and a connection surface that connects the first surface and the second surface, and that defines a land by the first surface, the second surface, and the connection surface; a trench structure formed on the first surface so as to be exposed from the connection surface; and a side wall wiring which is formed on the second surface so as to cover the connection surface, and which is electrically connected to the trench structure. SiC半导体装置包括:SiC芯片,其具有主面,该主面包含第一面、在上述第一面外向厚度方向凹陷的第二面、以及连接上述第一面及上述第二面的连接面,且由上述第一面、上述第二面以及上述连接面划分出台地;沟槽构造,其以从上述连接面露出的方式形成于上述第一面;以及侧壁配线,其以包覆上述连接面的方式形成于上述第二面之上,且与上述沟槽构造电连接。