Inspection equipment state evaluation method and device, computer equipment and storage medium

The embodiment of the invention discloses an inspection equipment state evaluation method and device, computer equipment and a storage medium, and the method comprises the steps: inputting a current feature, a voltage feature, a quality control curve center curvature and a key control point operatio...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SHENG XIMING, ZHANG MIN, LIU LIPING, ZHOU TINGTING, LIU MINGZHU, LI YUYAN, LIU SHENGWEI, WANG SHUANGGE
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The embodiment of the invention discloses an inspection equipment state evaluation method and device, computer equipment and a storage medium, and the method comprises the steps: inputting a current feature, a voltage feature, a quality control curve center curvature and a key control point operation temperature feature set into a preset state prediction model for state prediction, a current state value, a voltage state value, a center curvature state value and an operation temperature state value are obtained, and the state prediction model is a model obtained based on BP neural network training; and determining a comprehensive state evaluation value according to the current state value, the voltage state value, the center curvature state value and the operating temperature state value. The comprehensive state evaluation value is determined based on the current characteristic, the voltage characteristic, the quality control curve center curvature and the key control point operation temperature characteristic